International Symposium on Plasma Process-Induced Damage (2nd 1997 Monterey, Calif.)
1997 2nd International Symposium on Plasma Process-Induced Damage
International Symposium on Plasma Process-Induced Damage (2nd 1997 Monterey, Calif.), Calif.) International Symposium on Plasma Process-Induced Damage (2nd : 1997 : Monterey, Kin P. Cheung, Moritaka Nakamura · 1997
פרטי הספר
- שנה
- 1997
- שפה
- English
- הוצאה
- Northern California Chapter of the American V
- מהדורות
- 2
- עמודים
- 259
- ISBN
- 9780965157711
מקור הנתונים: Wikidata