Electron Beam Testing Technology

This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.

שנה

1993

שפה

English

סדרה

Microdevices, Physics and Fabrication Technologies

הוצאה

Springer US

מהדורות

1

עמודים

462

ISBN

9781489915221

מקור הנתונים: Wikidata