Fundamental Electron Interactions with Plasma Processing Gases

This volume deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. Recent advances in electron-molecule interaction processes are discussed and a unique up-to-date and comprehensive account of the fundamental interactions of low-energy electrons with molecules of current interest in modern technology, specially the semiconductor industry, is presented. The material provided in this volume will aid scientists and engineers working in many fields of basic and applied science and engineering. The unique and authoritative knowledge, information, and understanding it provides generically underpins advances in plasma, laser, lighting, discharge, environmental, radiation, and other technologies.

שנה

2004

שפה

English

סדרה

Physics of Atoms and Molecules

הוצאה

Springer US

מהדורות

1

עמודים

781

ISBN

9781461347415

מקור הנתונים: Wikidata