Laser-Assisted Microtechnology

Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.

שנה

1994

שפה

English

סדרה

Springer Series in Materials Science -- 19

הוצאה

Springer Berlin Heidelberg

מהדורות

1

עמודים

240

ISBN

9783642973291

מקור הנתונים: Wikidata