Physical Chemistry of, in and on Silicon

This book reviews the physical and chemical properties of silicon and furnishes an up-to-date collection of data. New phases of silicon are described, a new approach is presented to the group III acceptor structure, and detailed information is included on gettering techniques. Silicon processing for device manufacture is briefly discussed.

שנה

1989

שפה

English

סדרה

Springer Series in Materials Science -- 8

הוצאה

Springer Berlin Heidelberg

מהדורות

1

עמודים

122

ISBN

9783642735066

מקור הנתונים: Wikidata