Science and Technology of Integrated Ferroelectrics

Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices

Plasma-Surface Interactions and Processing of Materials

In situ real time characterization of thin films

Symposium Proceedings

Multicomponent and multilayered thin films for advanced microtechnologies

Plasma deposition, treatment, and etching of polymers

Plasma Diagnostics

Plasma Diagnostics Vol. 2

Ion Bombardment Modification of Surfaces

Ultrananocrystalline Diamond Coatings for Next-Generation High-Tech and Medical Devices