Advances in CMP/polishing technologies for the manufacture of electronic devicesToshiro K. Doi

Advances in CMP/polishing technologies for the manufacture of electronic devices

Name: Advances in CMP/polishing technologies for the manufacture of electronic devices
ISBN: 9781437778595

Toshiro K. Doi, Ioan D. Marinescu, Syuhei Kurokawa · 2012

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About the book

CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. --P. 4 of cover.

Book details

Year: 2012
Language: English
Publisher: Elsevier
Editions: 1
Pages: 317
ISBN: 9781437778595

Data source: Wikidata