Michael R. Oliver
Chemical-Mechanical Planarization of Semiconductor Materials
Michael R. Oliver · 2004
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This volume is a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, which is now a major part of state-of-the-art semiconductor technology. There are detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.
Book details
- Year
- 2004
- Language
- English
- Series
- Springer Series in Materials Science -- 69
- Publisher
- Springer Berlin Heidelberg
- Editions
- 1
- Pages
- 428
- ISBN
- 9783642077388
Data source: Wikidata
