Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-TechnologiesYves Pauleau

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies

Name: Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies
ISBN: 9789401003537

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Book details

Year: 2002
Language: English
Series: NATO Science Series, Series II: Mathematics, Physics and Chemistry, 1568-2609 -- 55
Publisher: Springer Netherlands
Editions: 1
Pages: 384
ISBN: 9789401003537

Data source: Wikidata