Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-TechnologiesY. Pauleau

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies

Y. Pauleau · 2002

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Book details

Year: 2002
Language: English
Publisher: Springer
Editions: 1
Pages: 384
ISBN: 9781402005244

Data source: Wikidata

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