CMOS-MEMSOliver Brand
CMOS-MEMS
Oliver Brand, Gary K. Fedder · 2005
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Book details
- Year
- 2005
- Language
- English
- Series
- Advanced micro & nanosystems -- v. 2
- Publisher
- Wiley-VCH
- Editions
- 1
- Pages
- 594
- ISBN
- 9783527616930
Data source: Wikidata