Design, Test, and Microfabrication of MEMS and MOEMSSPIE

Design, Test, and Microfabrication of MEMS and MOEMS

SPIE, Selden B. Crary, Wolfgang Ehrfeld, Hiroyuki Fujita · 1999

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Book details

Year: 1999
Language: English
Publisher: SPIE-International Society for Optical Engine
Editions: 1
Pages: 1192
ISBN: 9780819431547

Data source: Wikidata

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