Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IVHark Hoe Tan
Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV
Hark Hoe Tan · 2008
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Book details
- Year
- 2008
- Language
- English
- Series
- Proceedings of SPIE -- v. 6800
- Publisher
- SPIE
- Editions
- 1
- ISBN
- 9780819469717
Data source: Wikidata