Electron Beam Testing TechnologyJohn T. L. Thong
Electron Beam Testing Technology
John T. L. Thong · 1993
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About the book
This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.
Book details
- Year
- 1993
- Language
- English
- Series
- Microdevices, Physics and Fabrication Technologies
- Publisher
- Springer US
- Editions
- 1
- Pages
- 462
- ISBN
- 9781489915221
Data source: Wikidata