R. K. Leach
Fundamental principles of engineering nanometrology
R. K. Leach · 2010
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Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.
Book details
- Year
- 2010
- Language
- English
- Series
- Micro and nano technologies
- Publisher
- William Andrew
- Editions
- 1
- ISBN
- 9780080964546
Data source: Wikidata
