Handbook of plasma processing technologyStephen M. Rossnagel

Handbook of plasma processing technology

Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood · 1990

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Book details

Year: 1990
Language: English
Publisher: Noyes Publications
Editions: 3
Pages: 523
ISBN: 9780815512202

Data source: Wikidata

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