Klaus K. Schuegraf

Handbook of Thin Film Deposition Processes and Techniques
Klaus K. Schuegraf · 2001
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Traces the technology behind the spectacular growth in the silicon semiconductor industry and continued trend in miniaturization over the last 20 years.
Book details
- Year
- 2001
- Language
- English
- Publisher
- Elsevier
- Editions
- 1
- Pages
- 659
- ISBN
- 9780815517788
Data source: Wikidata