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Handbook of Thin Film Deposition Processes and Techniques

Klaus K. Schuegraf · 2001

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About the book

Traces the technology behind the spectacular growth in the silicon semiconductor industry and continued trend in miniaturization over the last 20 years.

Book details

Year
2001
Language
English
Publisher
Elsevier
Editions
1
Pages
659
ISBN
9780815517788

Data source: Wikidata

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