Laser-Assisted MicrotechnologySimeon M. Metev
Laser-Assisted Microtechnology
Simeon M. Metev · 1994
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About the book
Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
Book details
- Year
- 1994
- Language
- English
- Series
- Springer Series in Materials Science -- 19
- Publisher
- Springer Berlin Heidelberg
- Editions
- 1
- Pages
- 240
- ISBN
- 9783642973291
Data source: Wikidata
