LithographyStefan Landis
Lithography
Stefan Landis · 2011
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About the book
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--
Book details
- Year
- 2011
- Language
- English
- Publisher
- ISTE
- Editions
- 7
- Pages
- 377
- ISBN
- 9781848212022
Data source: Wikidata