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Materials Design, Fabrication, Packaging and Reliability of Nano and Micro-Electro-Mechanical Systems (N/MEMS)

Mustafa Yavuz, Arthur Willoughby, Peter Capper, Safa Kasap · 2017

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Book details

Year
2017
Language
English
Publisher
Wiley & Sons, Limited, John
Editions
4
Pages
424
ISBN
9781119130796

Data source: Wikidata

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