Reza Ghodssi
MEMS/MOEMS components and their applications IV
Reza Ghodssi, Srinivas A. Tadigadapa · 2007
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- Year
- 2007
- Language
- English
- Series
- Proceedings of SPIE -- v. 6464
- Publisher
- SPIE
- Editions
- 1
- ISBN
- 9780819465771
Data source: Wikidata
