Jörg Bagdahn
Microelectromechanical systems--materials and devices III
Jörg Bagdahn · 2010
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- Year
- 2010
- Language
- English
- Series
- Materials Research Society symposium proceedings -- v. 1222
- Publisher
- Materials Research Society
- Editions
- 2
- Pages
- 211
- ISBN
- 9781605111957
Data source: Wikidata