Modelling of Microfabrication Systems
Raja Nassar · 2003
Where to buy
Amazon’s price changes daily, so the most accurate place to see it is there, at the moment you buy.
View on AmazonAbout the book
This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.
Book details
- Year
- 2003
- Language
- English
- Series
- Microtechnology and MEMS
- Publisher
- Springer Berlin Heidelberg
- Editions
- 1
- Pages
- 269
- ISBN
- 9783642055362
Data source: Wikidata