Multi-wafer rotating MEMS machinesJeffrey Lang
Multi-wafer rotating MEMS machines
Jeffrey Lang · 2009
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Book details
- Year
- 2009
- Language
- English
- Series
- MEMS reference shelf
- Publisher
- Springer
- Editions
- 1
- Pages
- 456
- ISBN
- 9780387777467
Data source: Wikidata
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