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Nano- and microelectromechanical systems

Sergey Edward Lyshevski · 2018

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About the book

"Nano- and Microelectromechanical Systems builds the theoretical foundation needed to develop, analyze, and prototype NEMS and MEMS, their components, and their structures. It provides the background engineers need to model, design, simulate, control, implement, and deploy NEMS and MEMS. Most importantly, it prepares them to continue research in this challenging field and contribute to its further advancement."--BOOK JACKET.

Book details

Year
2018
Language
English
Publisher
Taylor & Francis Group
Editions
5
Pages
744
ISBN
9781351826488

Data source: Wikidata

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