Nanoimprint Lithography: An Enabling Process for Nanofabrication
Weimin Zhou · 2013
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Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application. <br>This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology. <br>Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.
Book details
- Year
- 2013
- Language
- English
- Publisher
- Springer Berlin Heidelberg
- Editions
- 1
- Pages
- 256
- ISBN
- 9783642344282
Data source: Wikidata
