Perspectives, Science and Technologies for Novel Silicon on Insulator Devices

This concise volume contains the key papers presented during the International NATO Advanced Research Workshop on Silicon on Insulator device technologies. The authors have moved beyond reporting the current state of the technology to explore wider issues, from the economic aspects incorporating SOI and related materials into circuits and systems to consideration of low temperature electronics, quantum devices and MEMS. <br/> <em>Readership:</em> Postgraduate and professional engineers and researchers in the major silicon manufacturing companies, universities and research institutes.

Year

2000

Language

English

Series

NATO Science Series, Series 3. High Technology, 1388-6576 -- 73

Publisher

Springer Netherlands

Editions

1

Pages

368

ISBN

9789401142618

Data source: Wikidata