Gianfranco Cerofolini
Physical Chemistry of, in and on Silicon
Gianfranco Cerofolini · 1989
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This book reviews the physical and chemical properties of silicon and furnishes an up-to-date collection of data. New phases of silicon are described, a new approach is presented to the group III acceptor structure, and detailed information is included on gettering techniques. Silicon processing for device manufacture is briefly discussed.
Book details
- Year
- 1989
- Language
- English
- Series
- Springer Series in Materials Science -- 8
- Publisher
- Springer Berlin Heidelberg
- Editions
- 1
- Pages
- 122
- ISBN
- 9783642735066
Data source: Wikidata
