Plasma Properties, Deposition, and Etching (Materials Science Forum Vols. 140-142)John J. Pouch

Plasma Properties, Deposition, and Etching (Materials Science Forum Vols. 140-142)

John J. Pouch · 1994

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Book details

Year: 1994
Language: English
Publisher: Trans Tech Publications
Editions: 1
Pages: 749
ISBN: 9780878496709

Data source: Wikidata

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