Plasma-Surface Interactions and Processing of Materials
Orlando Auciello · 1990
Where to buy
Amazon’s price changes daily, so the most accurate place to see it is there, at the moment you buy.
View on AmazonThis is an affiliate link: if you buy through it, the site earns a small commission at no extra cost to you, which helps us bring quality content and maintain the site. As an Amazon Associate we earn from qualifying purchases.
About the book
An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. <br/> The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. <br/> The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.
Book details
- Year
- 1990
- Language
- English
- Series
- NATO ASI Series, Series E: Applied Sciences, 0168-132X -- 176
- Publisher
- Springer Netherlands
- Editions
- 1
- Pages
- 576
- ISBN
- 9789400919464
Data source: Wikidata
More by Orlando Auciello
