Silicon Wafer Bonding Technology for VLSI and MEMS ApplicationsSubramanian S. Iyer

Silicon Wafer Bonding Technology for VLSI and MEMS Applications

Subramanian S. Iyer, Andre J. Auberton-Hervé · 2011

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Book details

Year: 2011
Language: English
Publisher: Institution of Engineering & Technology
Editions: 1
ISBN: 9781849193702

Data source: Wikidata

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