Sputtering by particle bombardmentRainer Behrisch

Sputtering by particle bombardment
Rainer Behrisch, Wolfgang Eckstein · 2007
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Book details
- Year
- 2007
- Language
- English
- Series
- Topics in applied physics -- v. 110.
- Publisher
- Springer
- Editions
- 2
- Pages
- 507
- ISBN
- 9783540445005
Data source: Wikidata
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