Ivor Brodie
The physics of micro/nano-fabrication
Ivor Brodie · 1992
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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Book details
- Year
- 1992
- Language
- English
- Series
- Microdevices
- Publisher
- Springer
- Editions
- 1
- Pages
- 650
- ISBN
- 9781475767759
Data source: Wikidata
