Kamil A. Valiev
The Physics of Submicron Lithography
Kamil A. Valiev · 1992
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This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.
Book details
- Year
- 1992
- Language
- English
- Series
- Microdevices, Physics and Fabrication Technologies
- Publisher
- Springer US
- Editions
- 1
- Pages
- 493
- ISBN
- 9781461364610
Data source: Wikidata