ULSI semiconductor technology atlasChih-Hang Tung

ULSI semiconductor technology atlas
Chih-Hang Tung, George T. T. Sheng, Chih-Yuan Lu · 2003
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About the book
Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems.
Book details
- Year
- 2003
- Language
- English
- Publisher
- Wiley-Interscience
- Editions
- 3
- Pages
- 666
- ISBN
- 9780471457725
Data source: Wikidata