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ULSI semiconductor technology atlas

Chih-Hang Tung, George T. T. Sheng, Chih-Yuan Lu · 2003

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About the book

Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems.

Book details

Year
2003
Language
English
Publisher
Wiley-Interscience
Editions
3
Pages
666
ISBN
9780471457725

Data source: Wikidata