G. S. Oehrlein

G. S. Oehrlein

1 books in the database

Books

Materials, Technology and Reliability for Advanced Interconnects and Low-K DielectricsG. S. Oehrlein

Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics

G. S. Oehrlein · 2014

Co-authored books and collections

Books that list G. S. Oehrlein among their authors but not as the lead author: co-written works, collections and compilations.

Advanced etch technology for nanopatterningYing Zhang

Advanced etch technology for nanopatterning

Ying Zhang · 2012